PhotoMachining offers a variety of porous vacuum chuck designs for use with thin films, semiconductor wafers and other flat samples. The chuck has a pore size of less than 25 microns (60 microns optional) assuring uniform suction and strong holding power for even the smallest parts.
Porous Ceramic Vacuum Chuck
PhotoMachining is pleased to offer a porous vacuum chuck designed for use with thin films and other flat samples. The chuck has a pore size of less than 25 microns assuring uniform suction and strong holding power for even the smallest parts.
The chucks can be manufactured flat and parallel to better than 0.001" over the entire surface. Customer needs to supply only a vacuum pump or in house vacuum with a 1/8" or 1/4" NPT fitting. Alternatively, Photomachining offers a vacuum pump with all tubing and fittings required for operation (see below).
The units are less than 1.5" in height, and are all "lightweight."
Common Sizes | |
CVC-6-20: (in stock) 6" Square vacuum surface with 20 micron pore size |
$1300 |
CVC-6-20-R: (in stock) 6" Round vacuum surface with 20 micron pore size |
$1400 |
CVC-12-20: (in stock) 12" vacuum surface with 20 micron pore size |
$2400 |
You can view a PDF drawing for the 6 inch square, 6 inch round and 12 inch square.
They weigh approximately 4.2 lbs and 17 lbs respectively.
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Vacumm Pump, Part No. VVP-1.5